PHYSICS OF INTEGRATED-CIRCUIT LITHOGRAPHY

被引：0

作者：

PICKAR, KA ^{[1
]}

机构：

[1] BELL NO RES,OTTAWA,ONTARIO,CANADA

来源：

BULLETIN OF THE AMERICAN PHYSICAL SOCIETY | 1976年 / 21卷 / 05期

关键词：

D O I：

暂无

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

引用

页码：820 / 820

页数：1

共 50 条

[11] INTEGRATED-CIRCUIT RELIABILITY
YATES, WW
[J]. DESIGN NEWS, 1976, 31 (02) : 43 - &
[12] MAKING OF AN INTEGRATED-CIRCUIT
JONES, P
[J]. ELECTRONICS AND POWER, 1975, 21 (21-2): : 1179 - 1182
[13] GENESIS OF INTEGRATED-CIRCUIT
WOLFF, MF
[J]. IEEE SPECTRUM, 1976, 13 (08) : 44 - 53
[14] INTEGRATED-CIRCUIT DEVELOPMENT
BROTHERS, JS
[J]. RADIO AND ELECTRONIC ENGINEER, 1973, 43 (1-2): : 39 - 48
[15] INTEGRATED-CIRCUIT TESTING
BARBER, MR
ZACHARIAS, A
[J]. BELL LABORATORIES RECORD, 1977, 55 (05): : 124 - 130
[16] METALLIZATION FOR INTEGRATED-CIRCUIT MANUFACTURING
JOSHI, RV
BLEWER, RS
MURARKA, S
[J]. MRS BULLETIN, 1995, 20 (11) : 33 - 37
[17] REUSING INTEGRATED-CIRCUIT DESIGNS
JONES, ME
[J]. COMPUTER DESIGN, 1995, 34 (07): : 126 - 127
[18] INTEGRATED-CIRCUIT VOLTAGE REFERENCE
REHMAN, MA
[J]. ELECTRONIC ENGINEERING, 1980, 52 (638): : 65 - &
[19] MOS INTEGRATED-CIRCUIT RELIABILITY
SCHNABLE, GL
SCHLEGEL, ES
EWALD, HJ
[J]. IEEE TRANSACTIONS ON RELIABILITY, 1972, R 21 (01) : 12 - &
[20] CMOS INTEGRATED-CIRCUIT RELIABILITY
SCHNABLE, GL
COMIZZOLI, RB
[J]. MICROELECTRONICS RELIABILITY, 1981, 21 (01) : 33 - 50