CHANNELING ION-IMPLANTATION THROUGH PALLADIUM FILMS

被引：3

|

作者：

ISHIWARA, H ^{[1
]}

FURUKAWA, S ^{[1
]}

机构：

[1] TOKYO INST TECHNOL,FAC ENGN,DEPT PHYS ELECTR,MEGUROKU 152,TOKYO,JAPAN

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1975年 / 12卷 / 06期

关键词：

D O I：

10.1116/1.568545

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

收藏

页码：1374 / 1377

页数：4

相关论文

共 50 条

[31] CHARACTERIZATION OF TIN FILMS OBTAINED BY ION-IMPLANTATION
ARMIGLIATO, A
GARULLI, A
GOVONI, D
OSTOJA, P
[J]. INSTITUTE OF PHYSICS CONFERENCE SERIES, 1983, (67): : 501 - 506
[32] TIN FILMS PREPARED ON BERYLLIUM BY ION-IMPLANTATION
QIU, CF
XU, SR
YANG, ZG
[J]. WEAR, 1991, 151 (01) : 119 - 122
[33] CONDUCTING POLYMER-FILMS BY ION-IMPLANTATION
LU, PH
MOODY, RA
LOH, IH
[J]. ELECTRONIC PACKAGING MATERIALS SCIENCE IV, 1989, 154 : 357 - 362
[34] ION-IMPLANTATION IN PBTIO3 FILMS
WANG, YG
QU, BD
ZHONG, WL
ZHANG, PL
WANG, KM
[J]. JOURNAL OF APPLIED PHYSICS, 1992, 72 (08) : 3726 - 3729
[35] ADHERENT ZIRCONIA FILMS BY REACTIVE ION-IMPLANTATION
BUNKER, SN
ARMINI, AJ
[J]. JOURNAL OF THE AMERICAN CERAMIC SOCIETY, 1993, 76 (02) : 347 - 349
[36] THE EFFECT OF ION-IMPLANTATION ON THE PROPERTIES OF AL FILMS
ZABOROWSKI, M
BARCZ, A
GAWLIK, G
RANGELOW, IW
[J]. APPLIED SURFACE SCIENCE, 1995, 91 (1-4) : 239 - 245
[37] TITANIUM NITRIDE FILMS PREPARED BY ION-IMPLANTATION
CHEN, PA
YANG, TT
[J]. THIN SOLID FILMS, 1981, 81 (01) : L91 - L92
[38] AMORPHIZATION OF NIOBIUM FILMS BY BORON ION-IMPLANTATION
LINKER, G
[J]. MATERIALS SCIENCE AND ENGINEERING, 1985, 69 (01): : 105 - 110
[39] APPLICATION OF ION-IMPLANTATION FOR DOPING OF POLYACETYLENE FILMS
KOSHIDA, N
WACHI, Y
[J]. APPLIED PHYSICS LETTERS, 1984, 45 (04) : 436 - 437
[40] ION-IMPLANTATION AND CATALYSIS - ELECTROCHEMICAL APPLICATIONS OF ION-IMPLANTATION
WOLF, GK
[J]. NUCLEAR INSTRUMENTS & METHODS, 1981, 182 (APR): : 875 - 885

← 1 2 3 4 5 →