OXIDATION MECHANISM OF POROUS SILICON-NITRIDE

被引：65
|
作者：
PORZ, F [1 ]
THUMMLER, F [1 ]
机构：
[1] KERNFORSCHUNGSZENTRUM KARLSRUHE GMBH,INST MAT & FESTKORPERFORSCH,D-7500 KARLSRUHE 1,FED REP GER
来源：
JOURNAL OF MATERIALS SCIENCE | 1984年 / 19卷 / 04期
关键词：
D O I：
10.1007/BF01120040
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：1283 / 1295
页数：13
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