OXIDATION MECHANISM OF POROUS SILICON-NITRIDE

被引：65

作者：

PORZ, F ^{[1
]}

THUMMLER, F ^{[1
]}

机构：

[1] KERNFORSCHUNGSZENTRUM KARLSRUHE GMBH,INST MAT & FESTKORPERFORSCH,D-7500 KARLSRUHE 1,FED REP GER

来源：

JOURNAL OF MATERIALS SCIENCE | 1984年 / 19卷 / 04期

关键词：

D O I：

10.1007/BF01120040

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：1283 / 1295

页数：13

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