CHARACTERIZATION OF REACTIVELY MAGNETRON SPUTTERED HYDROGENATED AMORPHOUS-SILICON FILMS

被引：0
|
作者：
RUBEL, H
SCHRODER, B
GEIGER, J
机构：
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A | 1986年 / 4卷 / 04期
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D O I：
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中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
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页码：1855 / 1860
页数：6
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