CHARACTERIZATION OF REACTIVELY MAGNETRON SPUTTERED HYDROGENATED AMORPHOUS-SILICON FILMS

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作者：

RUBEL, H

SCHRODER, B

GEIGER, J

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来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A | 1986年 / 4卷 / 04期

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中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

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页码：1855 / 1860

页数：6

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