THICKNESS UNIFORMITY OF CVD AL2O3 COATINGS

被引：0
|
作者：
BRYANT, WA [1 ]
KROPFL, DB [1 ]
机构：
[1] KENNAMET INC,PHILIP M MCKENNA LAB,GREENSBURG,PA 15601
来源：
JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1984年 / 131卷 / 03期
关键词：
D O I：
暂无
中图分类号：
O646 [电化学、电解、磁化学];
学科分类号：
081704 ;
摘要：
引用
收藏
页码：C94 / C94
页数：1
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