Synthesis of Al2O3 coatings on Ti(C, N)-based cermets by microwave plasma CVD using Al(acac)3

被引：1

作者：

Tu, Rong ^{[1
]}

Yuan, Yang ^{[1
]}

Guo, Litong ^{[1
]}

Li, Jun ^{[2
]}

Zhang, Song ^{[1
]}

Yang, Meijun ^{[1
]}

Li, Qizhong ^{[3
]}

Zhang, Lianmeng ^{[1
]}

Goto, Takashi ^{[1
]}

Ohmori, Hitoshi ^{[1
,4
]}

Shi, Ji ^{[1
,4
,5
]}

Li, Haiwen ^{[1
,6
]}

机构：

[1] Wuhan Univ Technol, State Key Lab Adv Technol Mat Synth & Proc, 122 Luoshi Rd, Wuhan 430070, Hubei, Peoples R China

[2] Inst Fluid Phys, Natl Key Lab Shock Wave & Detonat Phys, Mianyang, Sichuan, Peoples R China

[3] Wuhan Univ Technol, Hubei Key Lab Adv Technol Automobile Parts, Wuhan, Hubei, Peoples R China

[4] Inst Phys & Chem Res, Saitama, Japan

[5] Tokyo Inst Technol, Sch Mat & Chem Technol, Tokyo, Japan

[6] Kyushu Univ, Int Res Ctr Hydrogen Energy, Fukuoka, Fukuoka, Japan

来源：

INTERNATIONAL JOURNAL OF APPLIED CERAMIC TECHNOLOGY | 2019年 / 16卷 / 06期

基金：

中国国家自然科学基金;

关键词：

adhesion; Al2O3; coating; microstructure; microwave plasma CVD; Ti(C; N) cermets; THIN-FILMS; DEPOSITION; TRANSFORMATION; ALPHA-AL2O3;

D O I：

10.1111/ijac.13255

中图分类号：

TQ174 [陶瓷工业]; TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Aluminum acetylacetonate (Al(acac)(3)) was used as a precursor to synthesize aluminum oxide (Al2O3) coatings on Ti(C, N)-based ceramic by microwave plasma CVD (MPCVD). Al2O3 coatings transformed from gamma phase to delta phase and alpha phase and as microwave power (p(M)) and total pressure (P-tot) increased. The effects of p(M) and P-tot on the microstructure of the Al2O3 coating and oxidation of the substrate have been investigated. The relationship between phase structure and adhesive strength of the coatings was also studied. Coatings deposited at p(M) = 1.0-1.2 kW and P-tot = 400 Pa exhibited good adhesion strength (Class 1).

引用

页码：2265 / 2272

页数：8

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