THICKNESS UNIFORMITY OF CVD AL2O3 COATINGS

被引：0
|
作者：
BRYANT, WA [1 ]
KROPFL, DB [1 ]
机构：
[1] KENNAMET INC,PHILIP M MCKENNA LAB,GREENSBURG,PA 15601
来源：
JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1984年 / 131卷 / 03期
关键词：
D O I：
暂无
中图分类号：
O646 [电化学、电解、磁化学];
学科分类号：
081704 ;
摘要：
引用
收藏
页码：C94 / C94
页数：1
相关论文
共 50 条
  • [1] EELS investigation of CVD α-Al2O3, κ-Al2O3 and γ-Al2O3 coatings
    Larsson, A
    Zackrisson, J
    Halvarsson, M
    Ruppi, S
    [J]. MICROBEAM ANALYSIS 2000, PROCEEDINGS, 2000, (165): : 235 - 236
  • [2] Microstructure and properties of CVD γ-Al2O3 coatings
    Larsson, A
    Ruppi, S
    [J]. INTERNATIONAL JOURNAL OF REFRACTORY METALS & HARD MATERIALS, 2001, 19 (4-6): : 515 - 522
  • [3] Development of moderate temperature CVD Al2O3 coatings
    Connelly, R
    Pattanaik, AK
    Sarin, VK
    [J]. INTERNATIONAL JOURNAL OF REFRACTORY METALS & HARD MATERIALS, 2005, 23 (4-6): : 317 - 321
  • [4] Thermal stability of doped CVD κ-Al2O3 coatings
    Hochauer, D.
    Mitterer, C.
    Penoy, M.
    Michotte, C.
    Martinz, H. P.
    Kathrein, M.
    [J]. SURFACE & COATINGS TECHNOLOGY, 2010, 204 (21-22): : 3713 - 3722
  • [5] Doped CVD Al2O3 coatings for high performance cutting tools
    Kathrein, M
    Schintlmeister, W
    Wallgram, W
    Schleinkofer, U
    [J]. SURFACE & COATINGS TECHNOLOGY, 2003, 163 : 181 - 188
  • [6] Abrasive wear of texture-controlled CVD α-Al2O3 coatings
    Fallqvist, M.
    Olsson, M.
    Ruppi, S.
    [J]. SURFACE & COATINGS TECHNOLOGY, 2007, 202 (4-7): : 837 - 843
  • [7] Study of the interfacial structure and chemistry of CVD κ-Al2O3/TiC multilayer coatings
    Halvarsson, M
    Larsson, A
    Ruppi, S
    [J]. MICRON, 2001, 32 (08) : 807 - 815
  • [8] INFLUENCE OF CH4 AND AR ON THE MORPHOLOGIES OF AL2O3 - CVD COATINGS
    DANZINGER, M
    PENG, J
    HAUBNER, R
    LUX, B
    [J]. JOURNAL DE PHYSIQUE IV, 1991, 1 (C2): : 571 - 578
  • [9] Microstructural investigation of heat-treated CVD κ-Al2O3 multilayer coatings
    Larsson, A
    Halvarsson, M
    Vuorinen, S
    [J]. INTERNATIONAL JOURNAL OF REFRACTORY METALS & HARD MATERIALS, 1998, 16 (4-6): : 369 - 376
  • [10] Microstructure and wear mechanisms of texture-controlled CVD α-Al2O3 coatings
    M'Saoubi, R.
    Alm, O.
    Andersson, J. M.
    Engstrom, H.
    Larsson, T.
    Johansson-Joesaar, M. P.
    Schwind, M.
    [J]. WEAR, 2017, 376 : 1766 - 1778
12345