Study of the interfacial structure and chemistry of CVD κ-Al2O3/TiC multilayer coatings

被引:13
|
作者
Halvarsson, M [1 ]
Larsson, A
Ruppi, S
机构
[1] Chalmers Univ Technol, Dept Expt Phys, SE-41296 Gothenburg, Sweden
[2] Univ Gothenburg, SE-41296 Gothenburg, Sweden
[3] Seco Tools AB, Res & Dev, SE-73782 Fagersta, Sweden
基金
瑞典研究理事会;
关键词
HREM; CVD; interface; kappa-Al2O3; gamma-Al2O3; eta-Al2O3; TiC; multilayer; reaction zone;
D O I
10.1016/S0968-4328(00)00088-3
中图分类号
TH742 [显微镜];
学科分类号
摘要
This article describes the interfacial regions in CVD grown TiC/kappa -Al2O3 multilayers. A number of microanalytical techniques were used including HREM, EDX and EELS. Occasionally, the first 50 nm of the alumina layers deposited on the intermediate TiC layers grew as a cubic alumina, heavily faulted, containing small amounts of sulphur (S), maybe as a stabiliser. The presence of slightly rounded TiC (111) facets may act as preferred nucleation sites for the cubic Al2O3 phase, with a 'cube on cube' orientation relationship. In this way the nucleation Of kappa -Al2O3 is less favourable. After some tens of nanometres the cubic phase cannot be stabilised any longer and the layer continues to grow as kappa -Al2O3. A number of observations point towards the reaction zone (RZ) being eta- and/or gamma -Al2O3. The diffraction work and the FFT analysis of the HREM images show that the RZ is an fee phase with a = 7.9 Angstrom, which matches with eta- and gamma -Al2O3. The EELS Al fine structure indicate more tetrahedral Al ions than in kappa -Al2O3, as in eta- and gamma -Al2O3. The RZ contains small amounts of S, as has been reported for gamma -Al2O3. Due to the structural similarities between eta- and gamma -Al2O3 it was not possible to determine which of these cubic phases is present in the RZ. (C) 2001 Elsevier Science Ltd. All rights reserved.
引用
收藏
页码:807 / 815
页数:9
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