GROWTH-RATE AND PROPERTIES OF AMORPHOUS-CARBON LAYERS PRODUCED IN LOW-TEMPERATURE PLASMA

被引：0
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作者：
POLUNIN, VN
STANCHULA, PP
ANDREEV, AA
MELEKH, BT
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来源：
INORGANIC MATERIALS | 1986年 / 22卷 / 08期
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T [工业技术];
学科分类号：
08 ;
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页码：1126 / 1129
页数：4
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