GROWTH-RATE AND PROPERTIES OF AMORPHOUS-CARBON LAYERS PRODUCED IN LOW-TEMPERATURE PLASMA

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作者：

POLUNIN, VN

STANCHULA, PP

ANDREEV, AA

MELEKH, BT

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INORGANIC MATERIALS | 1986年 / 22卷 / 08期

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T [工业技术];

学科分类号：

08 ;

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页码：1126 / 1129

页数：4

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