SCANNING ION MICROSCOPY INVESTIGATION OF SEMICONDUCTOR-DEVICES

被引：0
|
作者：
GONCHOND, JP
MASCARIN, G
JOURDE, E
PANTEL, R
机构：
来源：
INSTITUTE OF PHYSICS CONFERENCE SERIES | 1991年 / 117期
关键词：
D O I：
暂无
中图分类号：
O4 [物理学];
学科分类号：
0702 ;
摘要：
Submicron CMOS devices have been investigated by Scanning Ion Microscopy using a 30 keV Gallium Focused Ion Beam operated in a SEIKO SMI8300 FIB microscope. Application examples in the fields of Process Monitoring and Failure Analysis of VLSI are described.
引用
收藏
页码：183 / 186
页数：4
相关论文
共 50 条
  • [31] RELIABILITY OF SEMICONDUCTOR-DEVICES
    PECK, DS
    PROCEEDINGS OF THE IEEE, 1974, 62 (02) : 147 - 148
  • [32] SIMULATION OF SEMICONDUCTOR-DEVICES
    AKERS, LA
    SIMULATION, 1977, 29 (02) : 33 - 41
  • [33] LASER SCANNING OF ACTIVE INTEGRATED-CIRCUITS AND DISCRETE SEMICONDUCTOR-DEVICES
    SAWYER, DE
    BERNING, DW
    LEWIS, DC
    SOLID STATE TECHNOLOGY, 1977, 20 (06) : 37 - &
  • [34] APPLICATION OF ION-IMPLANTATION TO THE FABRICATION OF COMPOUND SEMICONDUCTOR-DEVICES
    EISEN, FH
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1986, 133 (08) : C327 - C327
  • [35] LASER SCANNING TECHNIQUE FOR THE DETECTION OF RESISTIVITY AND LIFETIME INHOMOGENEITIES IN SEMICONDUCTOR-DEVICES
    ENGSTROM, O
    DRUGGE, B
    TOVE, PA
    PHYSICA SCRIPTA, 1978, 18 (06): : 357 - 363
  • [36] SOME APPLICATIONS OF ION MICROPROBE ANALYSIS TO PROBLEMS IN SEMICONDUCTOR-DEVICES
    DOI, H
    KANOMATA, I
    SAKUDO, N
    JAPANESE JOURNAL OF APPLIED PHYSICS, 1976, 15 : 71 - 78
  • [37] THE USE OF ALUMINUM ION-IMPLANTATION FOR POWER SEMICONDUCTOR-DEVICES
    HALDER, E
    ROGGWILLER, P
    GOBRECHT, J
    PHYSICA SCRIPTA, 1989, 39 (03): : 406 - 409
  • [38] ELECTRON-MICROSCOPY APPLICATION IN SEMICONDUCTOR-DEVICES RELIABILITY .1.
    FANTINI, F
    SENIN, A
    VANZI, M
    VECCHI, I
    JOURNAL DE MICROSCOPIE ET DE SPECTROSCOPIE ELECTRONIQUES, 1982, 7 (03): : A41 - A42
  • [39] Application of scanning capacitance microscopy to semiconductor devices
    Nakagiri, N
    Yamamoto, T
    Sugimura, H
    Suzuki, Y
    Miyashita, M
    Watanabe, S
    NANOTECHNOLOGY, 1997, 8 : A32 - A37
  • [40] Application of scanning capacitance microscopy to semiconductor devices
    Nakagiri, Nobuyuki
    Yamamoto, Takuma
    Sugimura, Hiroyuki
    Suzuki, Yoshihiko
    Miyashita, Masayuki
    Watanabe, Shunji
    Nanotechnology, 1997, 8 (3 A):
12345