DIFFUSION OF ION-IMPLANTED GA IN SIO2

被引：29
|
作者：
VANOMMEN, AH
机构：
来源：
JOURNAL OF APPLIED PHYSICS | 1985年 / 57卷 / 06期
关键词：
D O I：
10.1063/1.334418
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：1872 / 1879
页数：8
相关论文
共 50 条
  • [1] DIFFUSION OF ION-IMPLANTED AS IN SIO2
    VANOMMEN, AH
    [J]. JOURNAL OF APPLIED PHYSICS, 1984, 56 (10) : 2708 - 2715
  • [2] DIFFUSION OF ION-IMPLANTED IN AND TL IN SIO2
    VANOMMEN, AH
    [J]. JOURNAL OF APPLIED PHYSICS, 1985, 57 (12) : 5220 - 5225
  • [3] DIFFUSION OF ION-IMPLANTED SB IN SIO2
    VANOMMEN, AH
    [J]. JOURNAL OF APPLIED PHYSICS, 1987, 61 (03) : 993 - 997
  • [4] THE DIFFUSION OF ION-IMPLANTED ARSENIC IN THERMALLY GROWN SIO2
    SHACHAMDIAMOND, Y
    OLDHAM, WG
    KAZEROUNIAN, R
    [J]. JOURNAL OF ELECTRONIC MATERIALS, 1988, 17 (06) : 519 - 525
  • [5] Luminescence of isoelectronically ion-implanted SiO2 layers
    Salh, Roushdey
    Kourkoutis, L. Fitting
    Schmidt, B.
    Fitting, H.-J.
    [J]. PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE, 2007, 204 (09): : 3132 - 3144
  • [6] MECHANISMS OF DAMAGE RECOVERY IN ION-IMPLANTED SIO2
    DEVINE, RAB
    [J]. JOURNAL OF APPLIED PHYSICS, 1984, 56 (02) : 563 - 565
  • [7] TIME-DEPENDENT DIFFUSION OF ION-IMPLANTED ARSENIC IN THERMALLY GROWN SIO2
    YAMAJI, T
    ICHIKAWA, F
    [J]. JOURNAL OF APPLIED PHYSICS, 1988, 64 (05) : 2365 - 2371
  • [8] Synthesis and characterization of ion-implanted Pt nanocrystals in SiO2
    Giulian, R.
    Kluth, P.
    Johannessen, B.
    Araujo, L. L.
    Llewellyn, D. J.
    Cookson, D. J.
    Ridgway, M. C.
    [J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 2007, 257 : 33 - 36
  • [9] DEUTERIUM INTERACTIONS WITH ION-IMPLANTED SIO2 LAYERS IN SILICON
    MYERS, SM
    BROWN, GA
    REVESZ, AG
    HUGHES, HL
    [J]. JOURNAL OF APPLIED PHYSICS, 1993, 73 (05) : 2196 - 2206
  • [10] OPTICALLY INDUCED CHARGE STORAGE IN ION-IMPLANTED SIO2
    JACOBS, EP
    DORDA, G
    [J]. SOLID-STATE ELECTRONICS, 1977, 20 (04) : 367 - 372
12345