TELLURIUM-IMPLANTED N+ LAYERS IN GAAS

被引:17
|
作者
PASHLEY, RD
WELCH, BM
机构
[1] CALTECH,PASADENA,CA 91109
[2] ROCKWELL INT,SCI CTR,THOUSAND OAKS,CA 91360
关键词
D O I
10.1016/0038-1101(75)90115-X
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
引用
收藏
页码:977 / 981
页数:5
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