EFFECT OF DEPOSITION CONDITIONS ON THE ATOMIC-STRUCTURE OF HYDROGENATED AMORPHOUS-CARBON FILMS

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作者：
VASILEVA, ND
POPOV, AI
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INORGANIC MATERIALS | 1995年 / 31卷 / 04期
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T [工业技术];
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08 ;
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页码：417 / 422
页数：6
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