CONDITIONS OF PREPARATION, STRUCTURE, AND PROPERTIES OF HYDROGENATED FILMS OF AMORPHOUS-CARBON

被引：0
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作者：
LIGACHEV, VA
POPOV, AI
STUKACH, SN
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来源：
SEMICONDUCTORS | 1994年 / 28卷 / 12期
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中图分类号：
O469 [凝聚态物理学];
学科分类号：
070205 ;
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页码：1183 / 1188
页数：6
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