EFFECT OF DEPOSITION CONDITIONS ON THE ATOMIC-STRUCTURE OF HYDROGENATED AMORPHOUS-CARBON FILMS

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作者：

VASILEVA, ND

POPOV, AI

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INORGANIC MATERIALS | 1995年 / 31卷 / 04期

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T [工业技术];

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08 ;

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页码：417 / 422

页数：6

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