FABRICATION OF LINBO3 CHANNEL WAVE-GUIDES USING WATER

被引：5
|
作者：
SON, YS [1 ]
LEE, HJ [1 ]
JHEE, YK [1 ]
SHIN, SY [1 ]
KIM, BG [1 ]
机构：
[1] SOONG SIL UNIV, DEPT ELECTR ENGN, SEOUL, SOUTH KOREA
来源：
IEEE PHOTONICS TECHNOLOGY LETTERS | 1992年 / 4卷 / 05期
关键词：
D O I：
10.1109/68.136485
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A channel waveguide in LiNbO3 has been fabricated by using distilled water instead of acids for proton exchange and a self-aligned SiO2 cap for diffusion. It thereby demonstrated that the water reaction is an important reaction to cause the index change in proton exchange.
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页码：457 / 459
页数：3
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