FABRICATION OF LINBO3 CHANNEL WAVE-GUIDES USING WATER

被引：5

作者：

SON, YS ^{[1
]}

LEE, HJ ^{[1
]}

JHEE, YK ^{[1
]}

SHIN, SY ^{[1
]}

KIM, BG ^{[1
]}

机构：

[1] SOONG SIL UNIV, DEPT ELECTR ENGN, SEOUL, SOUTH KOREA

来源：

IEEE PHOTONICS TECHNOLOGY LETTERS | 1992年 / 4卷 / 05期

关键词：

D O I：

10.1109/68.136485

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A channel waveguide in LiNbO3 has been fabricated by using distilled water instead of acids for proton exchange and a self-aligned SiO2 cap for diffusion. It thereby demonstrated that the water reaction is an important reaction to cause the index change in proton exchange.

引用

页码：457 / 459

页数：3

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