STUDY OF DIAMOND NUCLEATION ON POROUS SILICON

被引：0
|
作者：
BAI, YZ
WANG, CL
JIN, ZS
LU, XY
ZOU, GT
机构：
来源：
CHINESE PHYSICS LETTERS | 1995年 / 12卷 / 07期
关键词：
D O I：
暂无
中图分类号：
O4 [物理学];
学科分类号：
0702 ;
摘要：
Diamond films have been deposited on porous silicon with microwave plasma chemical vapour deposition method. Nucleation density and site have been observed and analysed by using scanning electron micrography. Experimental results showed that the nucleation density changes with the porosity and the nucleation occurs mostly on the edge of the pores. Reasons of these phenomena are discussed.
引用
收藏
页码：435 / 437
页数：3
相关论文
共 50 条
  • [31] The nucleation of highly oriented diamond on silicon using a negative bias
    Kim, YK
    Lee, KH
    Lee, MJ
    Lee, JY
    [J]. THIN SOLID FILMS, 1999, 341 (1-2) : 211 - 215
  • [32] Influence of Reaction Pressure on Nucleation Rate of Diamond on Silicon Substrates
    舒兴胜
    邬钦崇
    梁荣庆
    [J]. Plasma Science and Technology, 2000, (05) : 475 - 479
  • [33] Diamond thin film nucleation on silicon by ultrasonication in various mixtures
    Varga, M.
    Vojs, M.
    Marton, M.
    Michalikova, L.
    Vesely, M.
    Redhammer, R.
    Michalka, M.
    [J]. VACUUM, 2012, 86 (06) : 681 - 683
  • [34] Tetramethysilane-assisted enhancement of diamond nucleation on silicon substrate
    Yi, Yong
    Xiong, Ying
    Zhuang, Hao
    Yang, Bing
    Wang, Bing
    Jiang, Xin
    [J]. SURFACE & COATINGS TECHNOLOGY, 2018, 349 : 959 - 962
  • [35] Diamond nucleation enhancement by pretreating the silicon substrate with a fluorocarbon plasma
    Schelz, S
    Martinu, L
    Moisan, M
    [J]. DIAMOND AND RELATED MATERIALS, 1998, 7 (09) : 1291 - 1302
  • [36] NUCLEATION AND INITIAL-STAGES OF GROWTH OF DIAMOND FILMS ON SILICON
    VAZQUEZ, L
    ALBELLA, JM
    SANCHEZ, O
    GOMEZALEIXANDRE, C
    MARTINEZDUART, JM
    [J]. SCRIPTA METALLURGICA ET MATERIALIA, 1994, 31 (08): : 1103 - 1108
  • [37] Effect of oxygen on the bias-enhanced nucleation of diamond on silicon
    Schreck, M
    Thürer, KH
    Christensen, C
    Müller, M
    Stritzker, B
    [J]. DIAMOND AND RELATED MATERIALS, 1999, 8 (2-5) : 160 - 165
  • [38] Diamond nucleation enhancement by hydrofluoric acid etching of silicon substrate
    Schelz, S
    Borges, CFM
    Martinu, L
    Moisan, M
    [J]. DIAMOND AND RELATED MATERIALS, 1997, 6 (2-4) : 440 - 443
  • [39] Bias enhanced nucleation of diamond on silicon (100) in a HFCVD system
    Janischowsky, K
    Ebert, W
    Kohn, E
    [J]. DIAMOND AND RELATED MATERIALS, 2003, 12 (3-7) : 336 - 339
  • [40] Possible model of protein nucleation and crystallization on porous silicon
    Stolyarova, S
    Baskin, E
    Chayen, NE
    Nemirovsky, Y
    [J]. PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE, 2005, 202 (08): : 1462 - 1466
12345