SPECTRAL CHARACTERISTICS OF AR-N-2, AR-O-2, AR-HE MIXED GAS INDUCTIVELY COUPLED PLASMAS .2.

被引:39
|
作者
CHOOT, EH [1 ]
HORLICK, G [1 ]
机构
[1] UNIV ALBERTA,DEPT CHEM,EDMONTON T6G 2G2,ALBERTA,CANADA
关键词
D O I
10.1016/0584-8547(86)80095-7
中图分类号
O433 [光谱学];
学科分类号
0703 ; 070302 ;
摘要
引用
收藏
页码:907 / 924
页数:18
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