SELF-ORGANIZATION PHENOMENA DURING POROUS SILICON FORMATION

被引:4
|
作者
PROKAZNIKOV, AV [1 ]
MASLYENITSYN, SF [1 ]
SVYATCHENKO, AA [1 ]
PAVLOV, ST [1 ]
机构
[1] PN LEBEDEV PHYS INST,MOSCOW 117924,RUSSIA
关键词
D O I
10.1016/0038-1098(94)90463-4
中图分类号
O469 [凝聚态物理学];
学科分类号
070205 ;
摘要
In the system of electrolyte (hydrofluoric acid - HF-48 %)-silicon (phosphorus doped, specific resistivity is equal to 4.5 OMEGA.cm) the self-organization phenomena were discovered and investigated which are developed during the pores formation and show themselves in formation of periodic concentric structures of closepacked array of pores of two kinds: circular and radial. Experimentally obtained current-potential characteristic is S-formed. The surface of porous silicon, which was formed by different conditions, is investigated.
引用
收藏
页码:217 / 221
页数:5
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