PERMANENT-MAGNET ELECTRON-CYCLOTRON-RESONANCE PLASMA SOURCE WITH REMOTE WINDOW

被引：9
|
作者：
BERRY, LA
GORBATKIN, SM
机构：
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A | 1995年 / 13卷 / 02期
关键词：
D O I：
10.1116/1.579420
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
引用
收藏
页码：343 / 348
页数：6
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