ELECTRONIC TRANSPORT INVESTIGATIONS ON SILICON DAMAGED BY ARSENIC ION-IMPLANTATION

被引：9
|
作者：
JAOUEN, H
GHIBAUDO, G
CHRISTOFIDES, C
机构：
来源：
JOURNAL OF APPLIED PHYSICS | 1986年 / 60卷 / 05期
关键词：
D O I：
10.1063/1.337260
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：1699 / 1704
页数：6
相关论文
共 50 条
  • [21] ION-IMPLANTATION IN SILICON FILMS ON SAPPHIRE
    EKLUND, KH
    HOLMEN, G
    PETERSTROM, S
    [J]. APPLIED PHYSICS LETTERS, 1974, 24 (06) : 283 - 284
  • [22] SILICON ON SAPPHIRE FOR ION-IMPLANTATION STUDIES
    GROSS, C
    PISCIOTT.BP
    [J]. SOLID STATE TECHNOLOGY, 1974, 17 (11) : 8 - 8
  • [23] PULSED ION-IMPLANTATION OF SILICON WITH SELENIUM
    SERFOZO, G
    NAUJOKAITIS, R
    KRAFCSIK, I
    DOZSA, L
    BATTISTIG, G
    RIEDL, P
    KLOPFER, E
    GERASIMENKO, NN
    GYULAI, J
    [J]. EPM 87: ENERGY PULSE AND PARTICLE BEAM MODIFICATION OF MATERIALS, 1988, 8 : 74 - 79
  • [24] RECENT DEVELOPMENTS IN ION-IMPLANTATION IN SILICON
    PALS, JA
    BROTHERTON, SD
    VANOMMEN, AH
    POLITIEK, J
    LIGTHART, HJ
    [J]. MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY, 1989, 4 (1-4): : 87 - 94
  • [25] SILICON PRODUCTION APPLICATIONS OF ION-IMPLANTATION
    SMITH, TC
    [J]. IEEE TRANSACTIONS ON NUCLEAR SCIENCE, 1979, 26 (01) : 1677 - 1682
  • [26] ON THE MECHANISM OF SILICON AMORPHIZATION BY ION-IMPLANTATION
    YARKULOV, U
    [J]. CRYSTAL LATTICE DEFECTS AND AMORPHOUS MATERIALS, 1987, 13 (3-4): : 305 - 313
  • [27] ION-IMPLANTATION OF IMPURITIES INTO POLYCRYSTALLINE SILICON
    KISIELEWICZ, M
    ZIELINSKASZOT, M
    ZUK, W
    [J]. ACTA PHYSICA POLONICA A, 1979, 56 (05) : 609 - 618
  • [28] ION-IMPLANTATION IN SILICON - RESEARCH AND APPLICATIONS
    MACRAE, AU
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1977, 14 (01): : 531 - 531
  • [29] SILICON PRODUCTION APPLICATIONS OF ION-IMPLANTATION
    SMITH, TC
    [J]. BULLETIN OF THE AMERICAN PHYSICAL SOCIETY, 1978, 23 (08): : 1031 - 1031
  • [30] ION-IMPLANTATION OF SULFUR AND SILICON IN GAAS
    LIU, SG
    DOUGLAS, EC
    WU, CP
    MAGEE, CW
    NARAYAN, SY
    JOLLY, ST
    KOLONDRA, F
    JAIN, S
    [J]. RCA REVIEW, 1980, 41 (02): : 227 - 262
12345