PROLOG TO CHALLENGES IN MANUFACTURING SUBMICRON, ULTRA-LARGE SCALE INTEGRATED-CIRCUITS - A TUTORIAL INTRODUCTION

被引：0
|
作者：
BRAHAM, R
机构：
来源：
PROCEEDINGS OF THE IEEE | 1990年 / 78卷 / 11期
关键词：
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
收藏
页码：1685 / 1686
页数：2
相关论文
共 50 条
  • [21] REACTIVE DRY ETCHING FOR FABRICATION OF VERY-LARGE-SCALE INTEGRATED-CIRCUITS
    BEINVOGL, W
    MADER, H
    SIEMENS FORSCHUNGS-UND ENTWICKLUNGSBERICHTE-SIEMENS RESEARCH AND DEVELOPMENT REPORTS, 1982, 11 (04): : 180 - 189
  • [22] PLANARIZATION OF DIELECTRICS USED IN THE MANUFACTURE OF VERY-LARGE-SCALE INTEGRATED-CIRCUITS
    MALIK, F
    SOLANKI, R
    THIN SOLID FILMS, 1990, 193 (1-2) : 1030 - 1037
  • [23] RELAX - A NEW CIRCUIT SIMULATOR FOR LARGE-SCALE MOS INTEGRATED-CIRCUITS
    LELARASMEE, E
    SANGIOVANNIVINCENTELLI, A
    COMPUTER-AIDED DESIGN, 1983, 15 (05) : 262 - 270
  • [24] Thin-film transistor and ultra-large scale integrated circuit: Competition or collaboration
    Kuo, Yue
    JAPANESE JOURNAL OF APPLIED PHYSICS, 2008, 47 (03) : 1845 - 1852
  • [25] SOME APPLICATIONS OF MICROANALYTICAL TECHNIQUES IN VERY LARGE-SCALE INTEGRATED-CIRCUITS FABRICATION
    THOMAS, S
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1989, 7 (03): : 1810 - 1817
  • [26] A NEW HIGH-DENSITY METALLIZATION PROCESS FOR LARGE-SCALE INTEGRATED-CIRCUITS
    KIM, W
    IEEE TRANSACTIONS ON ELECTRON DEVICES, 1984, 31 (12) : 1851 - 1854
  • [27] COMPUTER-AIDED LAYOUT OF LARGE-SCALE INTEGRATED-CIRCUITS BASED ON CELLS
    KOLLER, K
    LAUTHER, U
    NACHRICHTENTECHNISCHE ZEITSCHRIFT, 1978, 31 (12): : 906 - 910
  • [28] PLASMA ETCHING OF METAL-FILMS IN FABRICATION OF LARGE-SCALE INTEGRATED-CIRCUITS
    LEGAT, WH
    SCHILLING, H
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1975, 122 (08) : C252 - C252
  • [29] Volume manufacturing and deployment of large-scale photonic integrated circuits
    Kish, Fred A.
    Welch, David F.
    Pleumeekers, Jacco L.
    Mathur, Atul
    Evans, Peter W.
    Muthiah, Ranjani
    Murthy, Sanjeev
    Kauffman, Mike
    Freeman, Paul
    Schneider, Richard P., Jr.
    Ziari, Mehrdad
    Joyner, Charles H.
    Bostak, Jeffrey S.
    Butrie, Timothy
    Dentai, Andrew G.
    Dominic, Vincent G.
    Hurtt, Sheila K.
    Kato, Masaki
    Lambert, Damien J. H.
    Miles, Richard H.
    Mitchell, Matthew L.
    Missey, Mark J.
    Nagarajan, Radhakrishnan
    Peters, Frank H.
    Pennypacker, Stephen C.
    Salvatore, Randal A.
    Schlenker, Rory
    Taylor, Robert B.
    Tsai, Huan-Shang
    Van Leeuwen, Michael F.
    Webjorn, Jonas
    Grubb, Stephen G.
    Reffle, Michael
    Mehuys, David G.
    Perkins, Drew
    Singh, Jagdeep
    2006 OPTICAL FIBER COMMUNICATION CONFERENCE/NATIONAL FIBER OPTIC ENGINEERS CONFERENCE, VOLS 1-6, 2006, : 840 - 842
  • [30] ELECTRON BEAM TESTING OF ULTRA LARGE SCALE INTEGRATED CIRCUITS.
    Garth, Simon C.J.
    Microelectronic Engineering, 1986, 4 (02) : 121 - 138
12345