PROLOG TO CHALLENGES IN MANUFACTURING SUBMICRON, ULTRA-LARGE SCALE INTEGRATED-CIRCUITS - A TUTORIAL INTRODUCTION

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BRAHAM, R

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PROCEEDINGS OF THE IEEE | 1990年 / 78卷 / 11期

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TM [电工技术]; TN [电子技术、通信技术];

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0808 ; 0809 ;

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页码：1685 / 1686

页数：2

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