SOFT MAGNETIC-PROPERTIES OF MULTILAYER FEY/SIN FILMS

被引：2
|
作者：
OKAYAMA, H
SUGENOYA, S
KOHMOTO, O
NARUMIYA, Y
机构：
[1] Research and Development Center, TDK Corporation, Higashi Owada
来源：
JOURNAL OF APPLIED PHYSICS | 1990年 / 67卷 / 09期
关键词：
D O I：
10.1063/1.345941
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
Magnetic properties of sputtered multilayer Fe100-xY x/Si3N4 films (x=0-3.5 at. %) were studied. We developed heat resistant and corrosion resistant soft magnetic films having high saturation induction (Bs). The Fe97.7Y 2.3/Si3N4 film has a Bs value of 17.3 kG, a coercive force (Hc) of 0.9 Oe, permeability at 5 MHz (μ) of 2800 and magnetostriction (λs) of ∼-1×10-6 after being annealed at 600°C.
引用
收藏
页码：5719 / 5721
页数：3
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