SOFT MAGNETIC-PROPERTIES OF MULTILAYER FEY/SIN FILMS

被引：2
|
作者：
OKAYAMA, H
SUGENOYA, S
KOHMOTO, O
NARUMIYA, Y
机构：
[1] Research and Development Center, TDK Corporation, Higashi Owada
来源：
JOURNAL OF APPLIED PHYSICS | 1990年 / 67卷 / 09期
关键词：
D O I：
10.1063/1.345941
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
Magnetic properties of sputtered multilayer Fe100-xY x/Si3N4 films (x=0-3.5 at. %) were studied. We developed heat resistant and corrosion resistant soft magnetic films having high saturation induction (Bs). The Fe97.7Y 2.3/Si3N4 film has a Bs value of 17.3 kG, a coercive force (Hc) of 0.9 Oe, permeability at 5 MHz (μ) of 2800 and magnetostriction (λs) of ∼-1×10-6 after being annealed at 600°C.
引用
收藏
页码：5719 / 5721
页数：3
相关论文
共 50 条
  • [1] SOFT MAGNETIC-PROPERTIES OF FE/COZR MULTILAYER FILMS
    JIMBO, M
    SOBUE, E
    TSUNASHIMA, S
    UCHIYAMA, S
    JOURNAL OF MAGNETISM AND MAGNETIC MATERIALS, 1992, 104 : 1829 - 1830
  • [2] STRUCTURE AND SOFT MAGNETIC-PROPERTIES OF FE/COZR MULTILAYER FILMS
    JIMBO, M
    SOBUE, E
    TSUNASHIMA, S
    UCHIYAMA, S
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1991, 30 (11A): : 2756 - 2760
  • [3] CRYSTAL-STRUCTURE AND SOFT MAGNETIC-PROPERTIES OF FEZRN/ALN MULTILAYER FILMS
    TANEKO, N
    SHIMADA, Y
    FUKAMICHI, K
    YOSHIHARA, A
    MIYAKAWA, C
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1991, 30 (08): : 1687 - 1691
  • [4] MAGNETIC-PROPERTIES OF FE/ND MULTILAYER FILMS
    SELLMYER, DJ
    ZHAO, ZR
    SHAN, ZS
    NAFIS, S
    JOURNAL OF APPLIED PHYSICS, 1987, 61 (08) : 4323 - 4325
  • [5] MAGNETIC-PROPERTIES OF MULTILAYER CO/CU FILMS
    FEDOSYUK, VM
    KASYUTICH, OI
    KOZICH, NN
    FIZIKA METALLOV I METALLOVEDENIE, 1991, (12): : 43 - 49
  • [6] STRUCTURE AND MAGNETIC-PROPERTIES OF MULTILAYER CONIW/CU FILMS
    FEDOSYUK, VM
    KASYUTICH, OI
    RUSSIAN JOURNAL OF ELECTROCHEMISTRY, 1994, 30 (06) : 716 - 717
  • [7] STRUCTURES AND MAGNETIC-PROPERTIES OF FE/CO MULTILAYER FILMS
    KOMURO, M
    KOZONO, Y
    NARISHIGE, S
    HANAZONO, M
    SUGITA, Y
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 1988, 27 (11): : L2105 - L2107
  • [8] MICROSTRUCTURE AND MAGNETIC-PROPERTIES OF CO/PD MULTILAYER FILMS
    YANG, T
    PAN, F
    LIU, BX
    PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1994, 142 (02): : 443 - 450
  • [9] STRUCTURE AND MAGNETIC-PROPERTIES OF CO/CU MULTILAYER FILMS
    KIM, JD
    PETFORDLONG, AK
    JAKUBOVICS, JP
    EVETTS, JE
    SOMEKH, R
    JOURNAL OF APPLIED PHYSICS, 1994, 76 (04) : 2387 - 2394
  • [10] CONBZRN ALLOY-FILMS WITH SOFT MAGNETIC-PROPERTIES
    SAKAI, R
    SHIMADA, Y
    JOURNAL OF APPLIED PHYSICS, 1990, 68 (09) : 4760 - 4766
12345