STRUCTURE AND SOFT MAGNETIC-PROPERTIES OF FE/COZR MULTILAYER FILMS

被引：0
|
作者：
JIMBO, M [1 ]
SOBUE, E [1 ]
TSUNASHIMA, S [1 ]
UCHIYAMA, S [1 ]
机构：
[1] NAGOYA UNIV,DEPT ELECTR,NAGOYA 46401,JAPAN
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1991年 / 30卷 / 11A期
关键词：
FE; COZR; MULTILAYER FILMS; MAGNETIC FILMS; RF SPUTTERING; SATURATION MAGNETIZATION; COERCIVE FORCE; MAGNETIC ANISOTROPY;
D O I：
10.1143/JJAP.30.2756
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
Fe/CoZr multilayer films prepared by the RF magnetron sputtering method are reported. The films have a bcc structure with the (110) preferred orientation and consist of fine crystallities of about 10 nm in diameter. The growth of crystallites is very gradual below 350-degrees-C. Even after annealing at 450-degrees-C, the grain growth is unremarkable, and compositionally modulated structure still remains. The films show excellent soft magnetic properties after annealing above 400-degrees-C. Typical values of saturation magnetization, coercive force and saturation magnetostriction were about 21 KG, 1.8 Oe, and +2 x 10(-5), respectively. The films also show a high permeability of about 1800 at frequencies up to 100 MHz.
引用
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页码：2756 / 2760
页数：5
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