ELECTRICAL-PROPERTIES OF AMORPHOUS TANTALUM PENTOXIDE THIN-FILMS ON SILICON

被引：68
|
作者：
OEHRLEIN, GS
REISMAN, A
机构：
来源：
JOURNAL OF APPLIED PHYSICS | 1983年 / 54卷 / 11期
关键词：
D O I：
10.1063/1.331880
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
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页码：6502 / 6508
页数：7
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