ELECTRICAL-PROPERTIES OF AMORPHOUS TANTALUM PENTOXIDE THIN-FILMS ON SILICON

被引：68

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作者：

OEHRLEIN, GS

REISMAN, A

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1983年 / 54卷 / 11期

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D O I：

10.1063/1.331880

中图分类号：

O59 [应用物理学];

学科分类号：

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页码：6502 / 6508

页数：7

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