VIBRONIC STATES OF SILICON SILICON DIOXIDE INTERFACE TRAPS

被引:21
|
作者
ENGSTROM, O
GRIMMEISS, HG
机构
关键词
D O I
10.1088/0268-1242/4/12/012
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
引用
收藏
页码:1106 / 1115
页数:10
相关论文
共 50 条
  • [21] ON THE SILICON DIOXIDE POLYCRYSTALLINE SILICON INTERFACE WIDTH MEASUREMENT
    QUEIROLO, G
    MANZINI, S
    MEDA, L
    ANDERLE, M
    CANTERI, R
    ARMIGLIATO, A
    FRABBONI, S
    [J]. SURFACE AND INTERFACE ANALYSIS, 1988, 13 (04) : 202 - 208
  • [22] NITROGEN REACTION AT A SILICON-SILICON DIOXIDE INTERFACE
    RAIDER, SI
    GDULA, RA
    PETRAK, JR
    [J]. APPLIED PHYSICS LETTERS, 1975, 27 (03) : 150 - 152
  • [23] SILICON-SILICON DIOXIDE INTERFACE - AN INFRARED STUDY
    BOYD, IW
    WILSON, JIB
    [J]. JOURNAL OF APPLIED PHYSICS, 1987, 62 (08) : 3195 - 3200
  • [24] Vibronic nature of hafnium oxide/silicon interface states investigated by capacitance frequency spectroscopy
    Engstrom, O.
    Raeissi, B.
    Piscator, J.
    [J]. JOURNAL OF APPLIED PHYSICS, 2008, 103 (10)
  • [25] TIME-RESOLVED ANNEALING OF INTERFACE TRAPS AT THE SILICON OXIDE-SILICON INTERFACE
    BURTE, EP
    [J]. JOURNAL OF APPLIED PHYSICS, 1988, 64 (10) : 5013 - 5019
  • [26] Vibronic nature of hafnium oxide/silicon interface states investigated by capacitance frequency spectroscopy
    Engström, O.
    Raeissi, B.
    Piscator, J.
    [J]. Journal of Applied Physics, 2008, 103 (10):
  • [27] Interface traps creation by sub-band gap irradiation in silicon dioxide on silicon without applied electric field
    Zhong, L
    Shimura, F
    [J]. JOURNAL OF APPLIED PHYSICS, 1996, 79 (05) : 2509 - 2512
  • [28] NEW METHOD FOR SEPARATING AND CHARACTERIZING INTERFACE STATES AND OXIDE TRAPS ON OXIDIZED SILICON
    SAH, CT
    LIN, WWL
    PAN, SCS
    HSU, CCH
    [J]. APPLIED PHYSICS LETTERS, 1986, 48 (12) : 782 - 784
  • [29] SHALLOW TRAPS IN AS-IMPLANTED SILICON DIOXIDE
    ALEXANDROVA, S
    [J]. SEMICONDUCTOR SCIENCE AND TECHNOLOGY, 1991, 6 (08) : 797 - 799
  • [30] Dynamics of interface traps in bonded silicon wafers
    Khorasani, S
    Motieifar, A
    Rashidian, B
    [J]. APOC 2001: ASIA-PACIFIC OPTICAL AND WIRELESS COMMUNICATIONS: OPTOELECTRONICS, MATERIALS, AND DEVICES FOR COMMUNICATIONS, 2001, 4580 : 391 - 398