SILANE FORMATION ON SILICON - REACTION-KINETICS AND SURFACE-ANALYSIS

被引：35
|
作者：
FRANK, TC [1 ]
FALCONER, JL [1 ]
机构：
[1] UNIV COLORADO,DEPT CHEM ENGN,BOULDER,CO 80309
来源：
LANGMUIR | 1985年 / 1卷 / 01期
关键词：
D O I：
10.1021/la00061a017
中图分类号：
O6 [化学];
学科分类号：
0703 ;
摘要：
21
引用
收藏
页码：104 / 110
页数：7
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