ATOMIC-STRUCTURE AT THE COSI2/SI-LESS-THAN-GREATER-THAN-111-LESS-THAN-GREATER-THAN-INTERFACE

HRTEM has been used to investigate structural changes at the cobalt silicide/silicon interface. The samples were prepared by annealing of a UHV evaporated Co layer at 400, 500 and 900-degrees-C. Extensive image calculations have been used to study the atomic configuration at the CoSi2/Si interface. Experimental images were obtained on both thin foils and cleaved samples. The second technique is used for the first time in the case of a silicide/silicon system. Comparison between experimental images and calculated models show evidence for the 7-fold coordination of the first Co layer.