IMPURITY PROFILES OF GAAS EPITAXIAL LAYERS DOPED WITH SN, SI, AND GE GROWN WITH MOLECULAR-BEAM EPITAXY

被引:153
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作者
CHO, AY [1 ]
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[1] BELL TEL LABS INC,MURRAY HILL,NJ 07974
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D O I
10.1063/1.321777
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O59 [应用物理学];
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页码:1733 / 1735
页数:3
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