LIGHT ION-BOMBARDMENT SPUTTERING, STRESS BUILDUP, AND ENHANCED SURFACE CONTAMINATION

被引：15
|
作者：
EERNISSE, EP [1 ]
机构：
[1] SANDIA LABS,ALBUQUERQUE,NM 87115
来源：
JOURNAL OF NUCLEAR MATERIALS | 1974年 / 53卷 / 01期
关键词：
D O I：
10.1016/0022-3115(74)90248-7
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：226 / 230
页数：5
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