SPINNING ROTOR VISCOSITY GAUGE - A TRANSFER STANDARD FOR THE LABORATORY OR AN ACCURATE GAUGE FOR VACUUM PROCESS-CONTROL

被引：26
|
作者：
REICH, G
机构：
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1982年 / 20卷 / 04期
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D O I：
10.1116/1.571592
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
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页码：1148 / 1152
页数：5
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