CALIBRATION OF A SPINNING ROTOR GAS FRICTION GAUGE AGAINST A FUNDAMENTAL VACUUM PRESSURE STANDARD

被引：81
|
作者：
COMSA, G [1 ]
FREMEREY, JK [1 ]
LINDENAU, B [1 ]
MESSER, G [1 ]
ROHL, P [1 ]
机构：
[1] PHYS TECH BUNDESANSTALT BRAUNSCHWEIG, INST BERLIN, D-1000 BERLIN, FED REP GER
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1980年 / 17卷 / 02期
关键词：
D O I：
10.1116/1.570531
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：642 / 644
页数：3
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