A SPINNING-ROTOR VACUUM GAUGE WITH ELECTROSTATIC SUSPENSION

被引：3
|
作者：
WITT, DC
机构：
[1] Oxford University, Department of Engineering Science, Oxford, OX1 3PJ, Parks Road
来源：
VACUUM | 1995年 / 46卷 / 04期
关键词：
D O I：
10.1016/0042-207X(94)00086-7
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
The paper describes a new type of spinning-rotor vacuum gauge, in which the rotor is quasi-disc-shaped and suspended by electrostatic fields. Electrostatic forces are also used to accelerate it to its operating speed. The instrument is intended as a transfer standard which might measure pressures in high vacuum to an ultimate reliable accuracy of 10(-8) mbar (1 mu Pa) if possible. This has been approached, but the gauge still awaits tests against more absolute pressure measurements.
引用
收藏
页码：397 / 405
页数：9
相关论文
共 50 条
  • [1] Spinning-rotor vacuum gauge with electrostatic suspension
    Witt, DC
    [J]. METROLOGIA, 1999, 36 (06) : 607 - 612
  • [2] Decoupling Control of Micromachined Spinning-Rotor Gyroscope with Electrostatic Suspension
    Sun, Boqian
    Wang, Shunyue
    Li, Haixia
    He, Xiaoxia
    [J]. SENSORS, 2016, 16 (10)
  • [3] AN ELECTROSTATICALLY-SUSPENDED SPINNING-ROTOR VACUUM GAUGE - A FEASIBILITY STUDY
    NUTTALL, JD
    WITT, DC
    [J]. VACUUM, 1987, 37 (3-4) : 347 - 351
  • [4] Analysis and Compensation of Bias Drift for a Micromachined Spinning-Rotor Gyroscope with Electrostatic Suspension
    Wang, Shunyue
    Han, Fengtian
    [J]. SENSORS, 2020, 20 (06)
  • [5] SPINNING ROTOR GAUGE PROVIDES VACUUM TRANSFER STANDARD
    SULLIVAN, JJ
    LINHART, TW
    [J]. INDUSTRIAL RESEARCH & DEVELOPMENT, 1982, 24 (02): : 225 - +
  • [6] SOME COMMENTS ON THE STABILITY OF SPINNING-ROTOR GAUGES
    REDGRAVE, FJ
    DOWNES, SP
    [J]. VACUUM, 1988, 38 (8-10) : 839 - 842
  • [7] VAPOR-PRESSURE MEASUREMENTS ON TRANS-DIPHENYLETHENE AND NAPHTHALENE USING A SPINNING-ROTOR FRICTION GAUGE
    VANEKEREN, PJ
    JACOBS, MHG
    OFFRINGA, JCA
    DEKRUIF, CG
    [J]. JOURNAL OF CHEMICAL THERMODYNAMICS, 1983, 15 (05): : 409 - 417
  • [8] THE SPINNING ROTOR GAUGE
    FREMEREY, JK
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 1985, 3 (03): : 1715 - 1720
  • [9] THE SPINNING ROTOR GAUGE
    FREMEREY, JK
    [J]. PTB-MITTEILUNGEN, 1986, 96 (05): : 339 - 343
  • [10] Spinning rotor gauge based vacuum gauge calibration system at the Institute for Plasma Research (IPR)
    Semwal, Pratibha
    Khan, Ziauddin
    Dhanani, Kalpesh R.
    Pathan, Firozkhan S.
    George, Siju
    Raval, Dilip C.
    Thankey, Prashant L.
    Paravastu, Yuvakiran
    Himabindu, M.
    [J]. INTERNATIONAL SYMPOSIUM ON VACUUM SCIENCE AND TECHNOLOGY AND ITS APPLICATION FOR ACCELERATORS (IVS 2012), 2012, 390
12345