THE SPINNING ROTOR GAUGE

被引：105
|
作者：
FREMEREY, JK
机构：
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A | 1985年 / 3卷 / 03期
关键词：
D O I：
10.1116/1.573007
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
引用
收藏
页码：1715 / 1720
页数：6
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