DETERMINATION OF IMPURITY DOPANT DISTRIBUTIONS IN DIAMOND FILMS BY SIMS

被引：0
|
作者：
BUCKLEYGOLDER, IM
CHALKER, PR
GLASS, JT
KOBASHI, K
NAKAUE, A
机构：
[1] HARWELL LAB,CTR MICROELECTR MAT,DIDCOT OX11 ORA,OXON,ENGLAND
[2] KOBE STEEL LTD,ELECTR RES LAB,NISHI KU,KOBE 67302,JAPAN
[3] N CAROLINA STATE UNIV,DEPT MAT SCI & ENGN,RALEIGH,NC 27695
来源：
CARBON | 1990年 / 28卷 / 06期
关键词：
D O I：
10.1016/0008-6223(90)90311-L
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
引用
收藏
页码：801 / 801
页数：1
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