Infrared spectra study associated with hydrogen impurity in low pressure CVD diamond films

被引：1
|
作者：
Fu, HF [1 ]
Zhang, XH [1 ]
Yan, ET [1 ]
Liu, SS [1 ]
机构：
[1] Chinese Acad Sci, Changsha Inst Geotecton, Changsha 410013, Peoples R China
来源：
CHINESE SCIENCE BULLETIN | 1999年 / 44卷 / 16期
关键词：
diamond; hydrogen impurity; CVD; Fourier transform infrared spectroscopy (FT-IR);
D O I：
10.1007/BF03183574
中图分类号：
O [数理科学和化学]; P [天文学、地球科学]; Q [生物科学]; N [自然科学总论];
学科分类号：
07 ; 0710 ; 09 ;
摘要：
The infrared absorbance peaks at 2 852.4, 2 924.3, 2 963.0 and 3 034.9 cm(-1) have been observed in diamond films made by the direct current are discharge plasma chemical vapor deposition. Three former absorbance peaks have been assigned to C-H stretching in SP3 configuration, 3 034.9 cm(-1) has been assigned to C-H stretching in SP2 configuration. The effect of methane concentration and H-2 gas flow rate on absorption in the "C-H stretch" range has been investigated. Electron spin resonance analysis indicated that a considerable amount of defects exist in diamond films produced by low pressure chemical vapor deposition.
引用
收藏
页码：1508 / 1511
页数：4
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