KINETIC-EQUATION OF MULTISTAGE PROCESS OF THERMAL-OXIDATION OF SEMICONDUCTORS AND METALS

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作者：

UGAI, JA

ANOKHIN, VZ

KHOVIV, AM

MITTOVA, IJ

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来源：

DOKLADY AKADEMII NAUK SSSR | 1982年 / 266卷 / 05期

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O [数理科学和化学]; P [天文学、地球科学]; Q [生物科学]; N [自然科学总论];

学科分类号：

07 ; 0710 ; 09 ;

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页码：1188 / 1190

页数：3

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