KINETIC-EQUATION OF MULTISTAGE PROCESS OF THERMAL-OXIDATION OF SEMICONDUCTORS AND METALS

被引：0
|
作者：
UGAI, JA
ANOKHIN, VZ
KHOVIV, AM
MITTOVA, IJ
机构：
来源：
DOKLADY AKADEMII NAUK SSSR | 1982年 / 266卷 / 05期
关键词：
D O I：
暂无
中图分类号：
O [数理科学和化学]; P [天文学、地球科学]; Q [生物科学]; N [自然科学总论];
学科分类号：
07 ; 0710 ; 09 ;
摘要：
引用
收藏
页码：1188 / 1190
页数：3
相关论文
共 50 条
  • [1] A KINETIC-EQUATION OF THERMAL AND LASER-THERMAL OXIDATION OF SILICON
    UGAI, JA
    KHOVIV, AM
    BARSUKOVA, LV
    NAZARENKO, IN
    DUBOV, SI
    DOKLADY AKADEMII NAUK SSSR, 1988, 298 (03): : 670 - 672
  • [2] QUANTUM KINETIC-EQUATION FOR ELECTRONS IN METALS
    FLEUROV, VN
    KOZLOV, AN
    JOURNAL OF PHYSICS F-METAL PHYSICS, 1978, 8 (09): : 1899 - 1915
  • [3] APPROXIMATION OF BOLTZMANN KINETIC-EQUATION IN LIMITED SEMICONDUCTORS
    LOGVINOV, GN
    IZVESTIYA VYSSHIKH UCHEBNYKH ZAVEDENII FIZIKA, 1991, 34 (01): : 59 - 64
  • [4] KINETIC-EQUATION OF FLOTATION PROCESS - REPLY
    RUBINSHTEIN, YB
    FILIPPOV, YA
    GOLGER, YY
    COKE & CHEMISTRY USSR, 1974, (12): : 9 - 10
  • [5] KINETIC-EQUATION OF WATER-PENETRATION OF METALS
    BELYAKOV, YI
    FIZIKA TVERDOGO TELA, 1979, 21 (08): : 2240 - 2245
  • [6] QUANTUM KINETIC-EQUATION FOR ELECTRONIC TRANSPORT IN NONDEGENERATE SEMICONDUCTORS
    REGGIANI, L
    LUGLI, P
    JAUHO, AP
    PHYSICAL REVIEW B, 1987, 36 (12) : 6602 - 6608
  • [7] ON KINETIC-EQUATION OF THERMAL DITERTBUTYL DIPERFUMARATE DECOMPOSITION
    FEDOROVA, VA
    CHUCHMAREV, SK
    DARMOGRAY, MI
    UKRAINSKII KHIMICHESKII ZHURNAL, 1980, 46 (03): : 289 - 294
  • [8] A QUANTUM KINETIC-EQUATION FOR HIGH-FIELD TRANSPORT IN SEMICONDUCTORS
    BERTONCINI, R
    KRIMAN, AM
    FERRY, DK
    JOURNAL OF PHYSICS-CONDENSED MATTER, 1990, 2 (27) : 5991 - 6006
  • [9] ACTIVATION-ENERGIES FOR THERMAL-OXIDATION OF METALS
    VIJH, AK
    MATERIALS CHEMISTRY, 1978, 3 (02): : 105 - 111
  • [10] INHIBITION OF PROCESS OF THERMAL-OXIDATION OF POLYDIMETHYLSILOXANE
    PAPKOV, VS
    BULKIN, AF
    TSARENKO, AF
    ZHDANOV, AA
    ANDRIANOV, KA
    DOKLADY AKADEMII NAUK SSSR, 1978, 239 (03): : 647 - 649
12345