EFFECT OF SUBSTRATE BIAS ON THE PROPERTIES OF MICROCRYSTALLINE SILICON FILMS DEPOSITED IN A GLOW-DISCHARGE

被引：32

作者：

SAROTT, FA ^{[1
]}

IQBAL, Z ^{[1
]}

VEPREK, S ^{[1
]}

机构：

[1] UNIV ZURICH,INST INORGAN CHEM,CH-8057 ZURICH,SWITZERLAND

来源：

SOLID STATE COMMUNICATIONS | 1982年 / 42卷 / 06期

关键词：

D O I：

10.1016/0038-1098(82)90974-7

中图分类号：

O469 [凝聚态物理学];

学科分类号：

070205 ;

摘要：

引用

页码：465 / 468

页数：4

共 50 条

[1] MICROCRYSTALLINE SILICON FILMS DEPOSITED BY CATHODE-TYPE RF GLOW-DISCHARGE TECHNIQUE
JAYATISSA, AH
NAKANISHI, Y
HATANAKA, Y
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1995, 142 (05) : 1663 - 1666
[2] THERMOMECHANICAL PROPERTIES OF GLOW-DISCHARGE DEPOSITED SILICON AND SILICON-OXIDE FILMS
JANSEN, F
MACHONKIN, MA
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1988, 6 (03): : 1696 - 1698
[3] ELECTRONIC-PROPERTIES OF MICROCRYSTALLINE SILICON FILMS PREPARED IN A GLOW-DISCHARGE PLASMA
SPEAR, WE
WILLEKE, G
LECOMBER, PG
FITZGERALD, AG
JOURNAL DE PHYSIQUE, 1981, 42 (NC4): : 257 - 260
[4] MICROCRYSTALLINE SILICON DEPOSITED BY GLOW-DISCHARGE DECOMPOSITION OF HEAVILY DILUTED SILANE
CHOU, JS
SAH, WJ
LEE, SC
CHANG, TC
WANG, JC
MATERIALS CHEMISTRY AND PHYSICS, 1992, 32 (03) : 273 - 279
[5] CHANGES IN THE PROPERTIES OF GLOW-DISCHARGE-DEPOSITED MICROCRYSTALLINE SILICON FILMS WITH THICKNESS
DE, SC
RAY, S
BARUA, AK
THIN SOLID FILMS, 1988, 167 (1-2) : 121 - 127
[6] STRUCTURAL-PROPERTIES OF SILICON THIN-FILMS DEPOSITED BY GLOW-DISCHARGE
MESSANA, C
DEANGELIS, BA
CONTE, G
GRAMACCIONI, C
JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1981, 14 (06) : L91 - L94
[7] COMPARISON OF THE PROPERTIES OF HYDROGENATED MICROCRYSTALLINE SILICON FILMS DEPOSITED BY PHOTO CHEMICAL-VAPOR DEPOSITION AND GLOW-DISCHARGE DEPOSITION PROCESSES
DUTTA, J
UNAOGU, AL
RAY, S
BARUA, AK
JOURNAL OF APPLIED PHYSICS, 1989, 66 (10) : 4709 - 4714
[8] ELECTRONIC-PROPERTIES OF MICROCRYSTALLINE SILICON PREPARED IN THE GLOW-DISCHARGE PLASMA
SPEAR, WE
WILLEKE, G
LECOMBER, PG
PHYSICA B & C, 1983, 117 (MAR): : 908 - 913
[9] LUMINESCENCE IN GLOW-DISCHARGE DEPOSITED AMORPHOUS SILICON
STREET, RA
KNIGHTS, JC
BULLETIN OF THE AMERICAN PHYSICAL SOCIETY, 1978, 23 (03): : 248 - 248
[10] EFFECT OF SUBSTRATE BIAS ON THE PROPERTIES OF MICROCRYSTALLINE SILICON
VEPREK, S
IQBAL, Z
HELVETICA PHYSICA ACTA, 1984, 57 (06): : 730 - 730

← 1 2 3 4 5 →