IDENTIFICATION, ANNIHILATION, AND SUPPRESSION OF NUCLEATION SITES RESPONSIBLE FOR SILICON EPITAXIAL STACKING-FAULTS

被引：0
|
作者：
ROZGONYI, GA
DEYSHER, RP
PEARCE, CW
机构：
[1] BELL TEL LABS INC,MURRAY HILL,NJ 07974
[2] WESTERN ELECT CO INC,PRINCETON,NJ 08540
来源：
JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1976年 / 123卷 / 08期
关键词：
D O I：
暂无
中图分类号：
O646 [电化学、电解、磁化学];
学科分类号：
081704 ;
摘要：
引用
收藏
页码：C262 / C262
页数：1
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