EFFECT OF ELECTRON-IRRADIATION ON CRYSTALLIZATION OF VACUUM-DEPOSITED AMORPHOUS ANTIMONY FILMS

被引：5

|

作者：

HASHIMOTO, M

TABEI, A

TAJIMA, S

KATO, M

机构：

来源：

THIN SOLID FILMS | 1984年 / 113卷 / 02期

关键词：

D O I：

10.1016/0040-6090(84)90026-9

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

收藏

页码：L25 / L27

页数：3

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