EFFECT OF ELECTRON-IRRADIATION ON CRYSTALLIZATION OF VACUUM-DEPOSITED AMORPHOUS ANTIMONY FILMS

被引：5
|
作者：
HASHIMOTO, M
TABEI, A
TAJIMA, S
KATO, M
机构：
来源：
THIN SOLID FILMS | 1984年 / 113卷 / 02期
关键词：
D O I：
10.1016/0040-6090(84)90026-9
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：L25 / L27
页数：3
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