PROCESS TECHNOLOGY FOR MASS-PRODUCTION OF LARGE-AREA A-SI SOLAR MODULES

The production of large-area (0.6 x 1.0 m(2)) modules takes place in a fully automated semiconductor line and a semi-automated panel finishing line. The a-Si deposition occurs in a multichamber reactor for parallel processing of p-, i- and n-layers which provides for flexibility in the cell design (single- and multijunction structures) without significant loss in throughput. Specific aspects of module construction, namely the properties of commercially available large-area TCO substrates, scale-up of the PECVD process, and patterning for color-neutral semitransparent modules, are discussed. The module production is now based exclusively on a-Si/a-Si tandem structures. The average power output is initially 36 W, and stabilizes around 15% below that level.